Electron-induced chemistry of volatile precursor molecules is central to Focused Electron Beam Induced Deposition (FEBID), a very promising direct deposition technique for nanofabrication, capable of producing free-standing 3D structures of sub-10 nm size. However, to date, FEBID relies on precursors developed specifically for chemical vapour deposition (CVD) which is a thermally driven process. These precursors are not optimized for the electron-driven FEBID process. Thus, to reach the full scientific and commercial potential of FEBID, molecular precursors particularly adapted to its underlying electron-induced fragmentation mechanisms are urgently needed.
Research aiming at improved FEBID precursors requires a concerted approach linking fundamental knowledge on electron-driven chemistry in FEBID with rational design and chemical synthesis of novel, superior precursor molecules. The COST Action CELINA networks the relevant research communities including both experiment and theory. It thus performs the fundamental research on the electron-induced reactions of FEBID precursors and translates the generated knowledge to novel and superior precursors.
Participation of research groups in FEBID technology and industrial partners will further allow rapid transfer of the results into industrial processing. This unique programme will ensure that EU academia and industry remain the leaders in development and commercial exploitation of FEBID.
More information about COST Action CELINA: