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Approaches towards the synthesis of superior precursors

Synthetic approaches from CVD community have been reviewed by Working Group 2.
The synthetic approaches of participants Heinrich Lang, Anjana Devi, Mats Tilset, Iwona Szymanska, Markku Leskelä, and Sven Barth were presented at the general meetings CELINA 2014 and CELINA 2015 .

During the 1960s and 1970s, a wealth of metal organic precursors has been described in literature but many have been abandoned. A strategy towards precursor developments within CELINA has been to revisit this old chemistry and modify synthetic routes for current precursor needs:

Synthetic routes towards bimetallic precursors

Synthetic route to Ru precursor (η3-C3H5)Ru(CO)3Br

Synthetic route to different silacyclohexanes

Systematic variations of precursor architectures based on the known properties and performance in FEBID of specific previously investigated precursors were also proposed:

Design rules for FEBID precursors derived from previous insight on precursor fragmentation

The synthesis of small volatile Au precursors revisited - effect of ligand architecture

As essential step required for reaching this objective, a number of collaborations with synthetic groups have been established. More conclusions about favourable properties will likely emerge and need to be translated into stable and volatile precursors.