March 19
Arrival and optional get together in “Hotel Bayerischer Hof”
March 20
| 9:00 - 9:20 | Hubertus Marbach Petra Swiderek | Welcome Chemistry for ELectron-Induced Nanofabrication |
| 9:20 - 9:50 | Ivo Utke | Chemistry for Focused Electron Beam Induced Deposition |
| 9:50 - 10:30 | Oddur Ingolfsson | Dissociative electron attachment and dissociative ionization in FEBID; comparison of gas phase and surface studies on selected precursor molecules |
| 10:30 - 11:00 | Coffee break | |
| 11:00 - 11:30 | Hans Mulders | The ideal precursor: an industry perspective |
| 11:30 - 12:00 | Markku Leskelä | Volatile Precursors: Keys for Deposition of Thin Films by Chemical Gas-phase Techniques |
| 12:00 - 12:30 | Hubertus Marbach | Lithographic fabrication of clean nanostructures via Electron Beam Induced Surface Activation: new perspectives and challenges for precursor chemistry |
| 12:30 - 14:30 | Lunchbreak (Restaurant “Alter Simpl”) | |
| 14:30 - 14:50 | Patrik Hoffmann | Are Halides and/or Hydrides Ideal FEBIP Precursors ? |
| 14:50 - 15:10 | Iwona Szymanska | Electron-Impact Mass Spectrometry of Copper and Silver Carboxylate Compounds |
| 15:10 - 15:30 | Andrey Solov’yov | MBN Explorer - a powerful, universal tool for simulating multiscale complex molecular structure and dynamics: morphological transitions of nanostructures |
| 15:30 - 16:00 | Coffee break | |
| 16:00 - 18:30 | Poster and Discussion Session | |
| 17:30 - 18:30 | parallel MC meeting | |
| 18:30 - 19:30 | Dinner buffet at conference site | |
| 19:30 - open end | Further discussions/poster presentation | |
March 21
| 9:00 - 9:30 | Roser Valenti | Electron-beam-induced-deposition of nanotructures: an overview on microscopic modeling |
| 9:30 - 10:00 | Willem van Dorp | A study of gold complexes for focused electron beam induced deposition |
| 10:00 - 10:30 | Heinrich Lang | The Design of Metal-Organic Precursors for Gas Phase Deposition Processes |
| 10:30 - 11:00 | Coffee break | |
| 11:00 - 11:30 | Roman Curik | Electron-molecule interactions in FEBID through eyeglasses of scattering theory |
| 11:30 - 11:50 | Janina Kopyra | Electron driven processes in cisplatin |
| 11:50 - 12:10 | Sven Barth | Precursor Design for Vapor-Phase Growth of Inorganic films |
| 12:10 - 12:30 | Juraj Fedor | Electron-induced dissociative processes in FEBIP precursors and related molecules |
| 12:30 - 14:00 | Lunchbreak and discussion at conference site | |
| 14:00 - 14:30 | Maciej Gutowski | Electron-Initiated Proton Transfer in Molecular Systems |
| 14:30 - 14:50 | Richard Palmer | Non-local manipulation of polyatomic molecules in the STM |
| 14:50 - 15:10 | David Field | The spontelectric nature of films; implications for FEBID |
| 15:10 - 15:30 | Petra Swiderek | Concluding discussion and work plan |
| 15:30 - 16:00 | Coffee break | |
| 16:00 - 17:30 | WG meetings with further time for scientific discussions and conclusion of MC meeting | |
| 18:00 - open end | Guided tour to Erlangen and conference dinner in restaurant “Mein lieber Schwan” | |
March 22
Departure (optional lab visit)
Poster presentations
| Lionel Amiaud | Low energy electron inelastic scattering on aromatic self-assembled monolayers |
| Ilko Bald | Novel approaches to study low-energy electron-induced reactions in complex systems |
| Magdalena Barwiolek | The Cu(II) and Ag(I) with N,O donor ligands complexes as precursors of the hybrid layers |
| Jens Beckmann | Can silicon chemistry advance FEBID? |
| Andras Berkó | Investigation and application prospects of complementary studies in electron beam and tunneling electron induced precursor decomposition |
| Jean-Marc Breguet | New Instruments dedicated to Focused Electron Beam Induced Deposition |
| Esther Carrasco | Electron Beam Induced Processing as a lithographic tool for the generation of iron nanostructures on Si(100), silicon oxide and silicon nitride |
| Petr Carsky | Search for Resonances in Electron Scattering by Small and Medium-Sized Molecules by Joint Theoretical and Experimental Studies |
| José Maria de Teresa | Growth optimization of high-purity and high-aspect-ratio three-dimensional cobalt structures by FEBID |
| Martin Drost | Combining Focused electron beam induced processing with self-assembled functional molecules |
| Filipe Ferreira da Silva | Dissociative electron attachment to W(CO)6 |
| Gustavo Garcia | Clustering and condensation effects in the electron scattering cross sections from water molecules |
| Colin Georgi | A Cobalt Layer Deposition Study: Dicobaltatetrahedranes as Convenient MOCVD Precursor Systems |
| Cornelis W. Hagen | Multi-purpose Multi-beam SEM with 196 beams |
| Sangeetha Hari | Size and shape control of sub-20 nm structures fabricated by Electron Beam Induced Deposition |
| Sangeetha Hari | Biofunctionalizing Surfaces by Resist-free Electron Beam Patterning |
| Michael Huth | Nano-granular FEBID structures for dielectric sensor applications |
| Harald Jeschke | Vibrational fingerprints of tungsten and cobalt based molecules adsorbed on silica surfaces |
| Janos Kiss | Cobalt carbonyls as a candidate for producing metal nanoparticles on oxide nanostructures |
| Michal Lacko | The study of dissociative electron attachment to Iron pentacarbonyl molecule |
| Andreas Mauracher | Exploring organometallic molecules by electronic structure methods |
| Aleksandar Milosavljevic | Transport of electrons through a long metallic microcapillary: characterization of the outgoing low-energy electron beam |
| Olinda Monteiro | Single-source precursors for the synthesis of nanostructured crystalline materials |
| Peter Papp | Electron ionization and dissociative electron attachment to trimethyl borate |
| Harald Plank | Towards pure and compact FEBID deposits via e-beam assisted H2O purification at room temperature |
| Khrystyna Regeta | Bond cleavage in amines by dissociative electron attachment |
| Anastasia Riazanova | Select purification and shape control approaches for EBID of Au, Co and SiO2 for a range of applications |
| Anita Ribar | Dissociative Excitation of Fe(CO)5 Studied Using Electron Induced Fluorescence Apparatus |
| Albert Romano-Rodriguez | FEBIP and FIBIP as tools for nanodevice prototype |
| Marijke Scotuzzi | Etch masks for pattern transfer made by Electron Beam Induced Deposition |
| Mostafa Moonir Shawrav | Focused Electron Beam Induced Deposited multi-material nanostructures |
| Michal Stano | Electron impact ionization of iron pentacarbonyl |
| Aleksandra Szkudlarek | Application of pulsed IR laser to Focused-Electron-Beam-Induced-Deposition |
| Jelena Tamuliene | Is ComOn nanoparticle a precursor for the electron driven processes? Ab initio study |
| Rachel Thorman | Characterization of pi-allyl ruthenium tricarbonyl bromide as a potential EBID precursor by gas-phase and surface studies |
| Fan Tu | Fabrication of nanostructures with different precursors via Focused Electron Beam Induced Processing in UHV |
| Willem van Dorp | On the electron-induced dissociation of cis-platin |
| Willem van Dorp | Modelling the electron-induced dissociation of Ni(PF3)4 and Pt(PF3)4 with density functional theory |
| Florian Vollnhals | Fabrication of Iron Nanostructures from Fe(CO)5 by Electron Beam Induced Surface Activation of TiO2 |
| Jonas Warneke | Electron energy dependent fragmentation pathway of copper(II)acetylacetonate |
| Tom Wirtz | Reactive gas flooding for FIB - SIMS |
Chemistry and Molecular Sciences and Technology
Cluster of Excellence Engineering of Advanced Materials