March 19

Arrival and optional get together in “Hotel Bayerischer Hof”

March 20

9:00 - 9:20Hubertus Marbach
Petra Swiderek
Chemistry for ELectron-Induced Nanofabrication
9:20 - 9:50Ivo UtkeChemistry for Focused Electron Beam Induced Deposition
9:50 - 10:30Oddur IngolfssonDissociative electron attachment and dissociative ionization in FEBID; comparison of gas phase and surface studies on selected precursor molecules
10:30 - 11:00Coffee break
11:00 - 11:30Hans MuldersThe ideal precursor: an industry perspective
11:30 - 12:00Markku LeskeläVolatile Precursors: Keys for Deposition of Thin Films by Chemical Gas-phase Techniques
12:00 - 12:30Hubertus MarbachLithographic fabrication of clean nanostructures via Electron Beam Induced Surface Activation: new perspectives and challenges for precursor chemistry
12:30 - 14:30Lunchbreak (Restaurant “Alter Simpl”)
14:30 - 14:50Patrik HoffmannAre Halides and/or Hydrides Ideal FEBIP Precursors ?
14:50 - 15:10Iwona SzymanskaElectron-Impact Mass Spectrometry of Copper and Silver Carboxylate Compounds
15:10 - 15:30Andrey Solov’yovMBN Explorer - a powerful, universal tool for simulating multiscale complex molecular structure and dynamics: morphological transitions of nanostructures
15:30 - 16:00Coffee break
16:00 - 18:30Poster and Discussion Session
17:30 - 18:30parallel MC meeting
18:30 - 19:30Dinner buffet at conference site
19:30 - open endFurther discussions/poster presentation

March 21

9:00 - 9:30Roser ValentiElectron-beam-induced-deposition of nanotructures: an overview on microscopic modeling
9:30 - 10:00Willem van DorpA study of gold complexes for focused electron beam induced deposition
10:00 - 10:30Heinrich LangThe Design of Metal-Organic Precursors for Gas Phase Deposition Processes
10:30 - 11:00Coffee break
11:00 - 11:30Roman CurikElectron-molecule interactions in FEBID through eyeglasses of scattering theory
11:30 - 11:50Janina KopyraElectron driven processes in cisplatin
11:50 - 12:10Sven BarthPrecursor Design for Vapor-Phase Growth of Inorganic films
12:10 - 12:30Juraj FedorElectron-induced dissociative processes in FEBIP precursors and related molecules
12:30 - 14:00Lunchbreak and discussion at conference site
14:00 - 14:30Maciej GutowskiElectron-Initiated Proton Transfer in Molecular Systems
14:30 - 14:50Richard PalmerNon-local manipulation of polyatomic molecules in the STM
14:50 - 15:10David FieldThe spontelectric nature of films; implications for FEBID
15:10 - 15:30Petra SwiderekConcluding discussion and work plan
15:30 - 16:00Coffee break
16:00 - 17:30WG meetings with further time for scientific discussions and conclusion of MC meeting
18:00 - open endGuided tour to Erlangen and conference dinner
in restaurant “Mein lieber Schwan”

March 22

Departure (optional lab visit)

Poster presentations

Lionel AmiaudLow energy electron inelastic scattering on aromatic self-assembled monolayers
Ilko BaldNovel approaches to study low-energy electron-induced reactions in complex systems
Magdalena BarwiolekThe Cu(II) and Ag(I) with N,O donor ligands complexes as precursors of the hybrid layers
Jens BeckmannCan silicon chemistry advance FEBID?
Andras BerkóInvestigation and application prospects of complementary studies in electron beam and tunneling electron induced precursor decomposition
Jean-Marc BreguetNew Instruments dedicated to Focused Electron Beam Induced Deposition
Esther CarrascoElectron Beam Induced Processing as a lithographic tool for the generation of iron nanostructures on Si(100), silicon oxide and silicon nitride
Petr CarskySearch for Resonances in Electron Scattering by Small and Medium-Sized Molecules by Joint Theoretical and Experimental Studies
José Maria de TeresaGrowth optimization of high-purity and high-aspect-ratio three-dimensional cobalt structures by FEBID
Martin DrostCombining Focused electron beam induced processing with self-assembled functional molecules
Filipe Ferreira da SilvaDissociative electron attachment to W(CO)6
Gustavo GarciaClustering and condensation effects in the electron scattering cross sections from water molecules
Colin GeorgiA Cobalt Layer Deposition Study: Dicobaltatetrahedranes as Convenient MOCVD Precursor Systems
Cornelis W. HagenMulti-purpose Multi-beam SEM with 196 beams
Sangeetha HariSize and shape control of sub-20 nm structures fabricated by Electron Beam Induced Deposition
Sangeetha HariBiofunctionalizing Surfaces by Resist-free Electron Beam Patterning
Michael HuthNano-granular FEBID structures for dielectric sensor applications
Harald JeschkeVibrational fingerprints of tungsten and cobalt based molecules adsorbed on silica surfaces
Janos KissCobalt carbonyls as a candidate for producing metal nanoparticles on oxide nanostructures
Michal LackoThe study of dissociative electron attachment to Iron pentacarbonyl molecule
Andreas MauracherExploring organometallic molecules by electronic structure methods
Aleksandar MilosavljevicTransport of electrons through a long metallic microcapillary: characterization of the outgoing low-energy electron beam
Olinda MonteiroSingle-source precursors for the synthesis of nanostructured crystalline materials
Peter PappElectron ionization and dissociative electron attachment to trimethyl borate
Harald PlankTowards pure and compact FEBID deposits via e-beam assisted H2O purification at room temperature
Khrystyna RegetaBond cleavage in amines by dissociative electron attachment
Anastasia RiazanovaSelect purification and shape control approaches for EBID of Au, Co and SiO2 for a range of applications
Anita RibarDissociative Excitation of Fe(CO)5 Studied Using Electron Induced Fluorescence Apparatus
Albert Romano-RodriguezFEBIP and FIBIP as tools for nanodevice prototype
Marijke ScotuzziEtch masks for pattern transfer made by Electron Beam Induced Deposition
Mostafa Moonir ShawravFocused Electron Beam Induced Deposited multi-material nanostructures
Michal StanoElectron impact ionization of iron pentacarbonyl
Aleksandra SzkudlarekApplication of pulsed IR laser to Focused-Electron-Beam-Induced-Deposition
Jelena TamulieneIs ComOn nanoparticle a precursor for the electron driven processes? Ab initio study
Rachel ThormanCharacterization of pi-allyl ruthenium tricarbonyl bromide as a potential EBID precursor by gas-phase and surface studies
Fan TuFabrication of nanostructures with different precursors via Focused Electron Beam Induced Processing in UHV
Willem van DorpOn the electron-induced dissociation of cis-platin
Willem van DorpModelling the electron-induced dissociation of Ni(PF3)4 and Pt(PF3)4 with density functional theory
Florian VollnhalsFabrication of Iron Nanostructures from Fe(CO)5 by Electron Beam Induced Surface Activation of TiO2
Jonas WarnekeElectron energy dependent fragmentation pathway of copper(II)acetylacetonate
Tom WirtzReactive gas flooding for FIB - SIMS