Increased processing speed by enhanced reaction rates

An increase in processing speed requires either a larger surface density of precursor molecules or substantially larger cross sections for their electron-induced fragmentation. Combining both effects, the electron-induced degradation of copper(II)oxalate layers yielding pure Cu has been studied. This prototypical material degrades rapidly under electron exposure yielding pure Cu because the oxalate ions can directly be converted to CO₂ following electron impact ionization:

• Kai Rückriem, Sarah Grotheer, Henning Vieker, Paul Penner, André Beyer, Armin Gölzhäuser, Petra Swiderek:
  Efficient electron-induced removal of oxalate ions and formation of copper nanoparticles from copper(II) oxalate precursor layers,
  Beilstein J. Nanotechnol. 7 (2016) 852-861.