Objectives of CELINA

CELINA aims at finding solutions for challenges inherent in FEBID technology. The Action has this defined key scientific and technical objectives to establish FEBID as a powerful tool for development and production of novel NT devices. Follow the links below to learn about the achievements of CELINA with respect to these objectives.

The key scientific objectives of CELINA are to;

• obtain a detailed knowledge of electron-induced chemical reactions of FEBID precursors,
• identify from this the processes that limit purity and resolution,
• establish quantitative criteria on how the electron-driven reactions depend on the chemical properties of the precursor molecules,
• identify molecular characteristics that enhance dissociation through the PEs and quench adverse effects of SEs,
• establish approaches towards the synthesis of superior precursors,
• synthesize new classes of FEBID precursors.

The key technical objectives are to;

• increase the purity of deposits to achieve > 90 at.% metal content,
• increase composition control and thus flexibility through novel bimetallic precursors,
• enable unsurpassed resolution on a routine basis; sub-10 nm range,
• substantially improve the FEBID materials portfolio; pure metals, pure oxides, possibly nitrides,
• increase processing speed by enhancing reaction rates.